Failure Modes in Surface Micromachined MicroElectroMechanical Actuators
نویسندگان
چکیده
In order for the rapidly emerging field of MicroElectroMechanical Systems (MEMS) to meet its extraordinary expectations regarding commercial impact, issues pertaining to how they fail must be understood. We identify failure modes common to a broad range of MEMS actuators, including adhesion (stiction) and friction-induced failures caused by improper operational methods, mechanical instabilities, and electrical instabilities. Demonstrated methods to mitigate these failure modes include implementing optimized designs, model-based operational methods, and chemical surface treatments.
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